Sigma SQM-160 Guide de l'utilisateur

SQM-160Rate/Thickness MonitorUser’s GuideVersion 4.09

Chapter 1 Quick Start1-41.4 System ConnectionsThe diagram shows typical vacuum system wiring. The table identifies eachcomponent’s function.WARNING: M

Chapter 1 Quick Start1-51.5 Film SetupThis section will help you set up the SQM-160 to measure a film. Refer to Chapter 2 fordetailed programming inst

Chapter 1 Quick Start1-61.6 Depositing a FilmIf you have followed this Quick Start chapter, you are ready to deposit a film. Follow theprocedure below

Chapter 1 Quick Start1-7

Chapter 2 Operation2-12.0 IntroductionThis section details the operation of the SQM-160 menus and front panel controls. It isarranged by common user t

Chapter 2 Operation2-22.2 Film MenuThe Film Menu programs the SQM-160 for the materials that will be deposited as thinfilms. Ninety nine films can be

Chapter 2 Operation2-3Film MenuDisplay Description RangeDefaultUnitsDENSITY Density of the material beingdeposited. Consult the Appendix forcommon mat

Chapter 2 Operation2-4SENS AVG Enable/disable crystals for this film.See the Sensor Selection section ofthis chapter. *Not available whenRelay 2 is se

Chapter 2 Operation2-52.3 System MenuThe System Menu sets values that pertain to the overall functions of the SQM-160 andto your vacuum system’s setup

Chapter 2 Operation2-6System MenuDisplay Description Range Default UnitsTIMEBASE Time required for a measurement.Longer times yield higher accuracy.0.

Safety InformationRead this manual before installing, operating, or servicing this equipment. Do not installsubstitute parts, or perform any unauthori

Chapter 2 Operation2-7FMIN/MAX Sub-menu sets minimum andmaximum crystal frequencies.4.00 – 6.004.10-6.105.006.10MHzR/T BNDS Rate and Thickness Bounds

Chapter 2 Operation2-82.4 Sensor SelectionThe SQM-160 comes standard with two sensor inputs. Four additional sensors areavailable by adding a Sensor O

Chapter 2 Operation2-92.5 Sensor FrequencyThe Sensor Min/Max frequencies establish the operating range for the sensing quartzcrystals. Both values are

Chapter 2 Operation2-102.6 Sensor ToolingSensor Tooling adjusts for the difference in deposition rate between the sensor and thesubstrate being coated

Chapter 2 Operation2-112.7 Display UnitsThe SQM-160 can display crystal measurements in several different units. To selectthe display units:1. Press P

Chapter 2 Operation2-122.9 Zero ThicknessBefore starting each film deposition, you will probably want to reset the SQM-160Thickness value to zero. To

Chapter 2 Operation2-132.11 Dual SensorsDual shuttered sensors provide a backup (secondary) sensor in case of primary sensorfailure. When Relay 2 is p

Chapter 2 Operation2-142.12 Rate SamplingIn Rate Sampling mode, the SQM-160 opens a sensor shutter for a fixed time to“sample” the process rate, then

Chapter 2 Operation2-152.13 Time SetpointThe Time Setpoint provides a convenient way to signal a timed event. After a pre-programmed time period, the

Chapter 2 Operation2-162.14 Thickness SetpointThe Thickness Setpoint closes a relay when a programmed thickness is reached. Thissetpoint is independen

Warranty InformationThis INFICON product is warranted against defects in material and workmanship for aperiod of two (2) years from the date of shipme

Chapter 2 Operation2-172.15 Simulate ModeIn Simulate mode, the SQM-160 simulates attached sensors. It is an easy way tobecome familiar with the SQM-16

Chapter 2 Operation2-182.17 Analog Output ConfigurationThe SQM-160 analog outputs must be set to match the device that will be attached tothe Rate or

Chapter 2 Operation2-192.18 TroubleshootingMost SQM-160 problems are caused by defective crystals or improper film setup.Follow the procedures below t

Chapter 2 Operation2-20When the frequency reading is stable, start the deposition process. As material isdeposited on the crystal, the frequency readi

Chapter 2 Operation2-21

Chapter 3 Options3-13.0 Rack MountingThe Full Rack Extender option (PN 900-008) mounts a single SQM-160 into a full-width19” rack space. Follow these

Chapter 3 Options3-2

Chapter 4 Maintenance4-14.0 MaintenanceWARNING: There are no adjustments or user-serviceable parts inside the SQM-160.For maintenance or repair, conta

Chapter 4 Maintenance4-2A. Material ParametersIn the table below, an * is used to indicate that the material’s Z Factor is notknown. A method of deter

AppendixFormula Density Z-Ratio Material NameCa 1.550 2.620 CalciumCaF23.180 0.775 Calcium FluorideCaO 3.350 *1.000 Calcium OxideCaO-SiO22.900 *1.000

Table of ContentsChapter 1 Quick Start1.0 Introduction ...

AppendixFormula Density Z-Ratio Material NameFe 7.860 0.349 IronFe2O35.240 *1.000 Iron OxideFeO 5.700 *1.000 Iron OxideFeS 4.840 *1.000 Iron SulphideG

AppendixFormula Density Z-Ratio Material NameLa 6.170 0.920 LanthanumLa2O36.510 *1.000 Lanthanum OxideLaB62.610 *1.000 Lanthanum BorideLaF35.940 *1.00

AppendixFormula Density Z-Ratio Material NameNi 8910 0.331 NickelNiCr 8.500 *1.000 NichromeNiCrFe 8.500 *10~ InconelNiFe 8.700 *1.000 PermalloyNiFeMo

AppendixFormula Density Z-Ratio Material NameSm 7.540 0.890 SamariumSm2O37.430 *1.000 Samarium OxideSn 7.300 0.724 TinSnO26.950 *1.000 Tin OxideSnS 5.

AppendixFormula Density Z-Ratio Material NameVO24.340 *1.000 Vanadium DioxideW 19.300 0.163 TungstenWB210.770 *1.000 Tungsten BorideWC 15.600 0.151 Tu

AppendixAnother alternative is to change crystals frequently. For a crystal with 90% life,the error is negligible for even large errors in the program

AppendixB. SpecificationsMeasurementNumber of SensorsSensor Frequency RangeReference Frequency AccuracyReference Frequency StabilityThickness Display

AppendixDigital I/ODigital InputsFunctionsInput RatingRelay OutputsFunctionsRelay Rating4Open ShutterClose ShutterZero ThicknessZero Time5VDC, non-iso

AppendixC. I/O ConnectionsA 15-pin female D-sub connector is included with the instrument to connectdigital I/O to the SQM-160 Relay I/O connector. Th

AppendixC. CommunicationsCommunications with a computer is by RS-232, or optional USB or Ethernet.RS-232 requires a standard 9-pin straight through ca

Chapter 4 Maintenance4.0 Introduction ...4-14.1 Cle

AppendixSQM-160 Communications ProtocolThe SQM-160 communicates with a host computer via an ASCII based protocol.The instrument defaults to 19200 baud

AppendixCommand: @Parameters: NoneDescription: Returns the model number and software version number.Example: @ AMON Ver 2.01Command: AParameters: [1..

Appendix

AppendixCommand: CDescription: System 2 parameters. The parameters available for change orinspection are Minimum Frequency, Maximum Frequency,Minimum

AppendixExample: M A10.42 Average Rate is 10.42 Angstroms/SCommand: NParameters: [1..6]Description: Read the curent thickness for a channel.Example: N

AppendixDescription: Zero Average Thickness and Rate.Example: S ACommand: TParameters: None.Description: Zero TimeExample: T A Zeroes time display on

AppendixExample: Z A All Film and System parameters are setto defaults.

AppendixSIGMACOM.DLL Function DescriptionsThis dll acts as an interpreter between an application and the SQM160. The dlltransforms function calls to s

AppendixClearComm is used to clear the communications buffers in the dll.Example: ReturnVal =ClearComm() Clear the comm buffers inthe dllCloseCommPara

AppendixSendGetVers is used to retrieve the software version of the unit from theunit. This function must precede the use of the GetVers function

AppendixGetVersParameters: Pointer to Null-Terminated string.Return : 16 Bit Integer, always returns a 1.GetVers is used to retrieve the software vers

Appendixdo while(ChkCommDone == -1) wait for comm to finishReturnVal = GetFilm(&FilmStruct) FilmStruct contains Film infoSetSys1Parameters: Pointe

Appendixdo while(ChkCommDone == -1) wait for comm to finish

AppendixSendGetSys2Parameters: None.Return : 16 Bit Integer, always returns a 1.SendGetSys2 is used to get the System2 Parameters from the unit. Thisf

AppendixZeroStartTime is used to zero the beginning time before acquiring datawith GetAllData.

AppendixSendGetAllDataParameters: None.Return : 16 Bit Integer, always returns a 1.SendGetAllData is used to get the data from the unit. This function

AppendixExample:ReturnVal = SendCrystalLife(XtalNum) tell unit to transfer Life forXtalNumdo while(ChkCommDone == -1) wait for comm to finishReturnVal

AppendixSendGetShutter is used to retrieve the condition of the shutter, open orclosed, from the unit.

AppendixGetShutterParameters: None.Return : 16 Bit Integer, Shutter value (0 = Closed, 1 = Open).GetShutter is used to retrieve the value of the shutt

AppendixData Structures:The size of each data type in the structures is :double : 8 bytes, the LSB is thrown out before transmission to theunit.int :

Chapter 1 Quick Start1-11.0 IntroductionCongratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.The SQM-160 is an easy-to-us

Appendix

AppendixE. EC Declaration of ConformityThis is to certify that this equipment, designed and manufactured by:INFICON Inc.Two Technology PlaceEast Syrac

AppendixImmunity: EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC)Class A: Immunity per Table A1(EMC – Measurement, Control & Laboratory Equipment)

Chapter 1 Quick Start1-21.2 Front PanelFront Panel ControlsDisplay 1 Displays rate/thickness or frequency in normal operation. Ifmultiple sensors are

Chapter 1 Quick Start1-31.3 Rear PanelSensor 1 Sensor 2RS-232Option CardRelay I/O100-120/200-240V~50/60 Hz20 WThick OutRate Out3Sensor4 5 6Fuse T2.5A