Sigma SQC-122c Guide de l'utilisateur

SQC-122cThin Film Deposition ControllerUser’s GuideVersion 2.0© Copyright Sigma Instruments, Inc. 1999 - 2002Sigmainstruments

Chapter 1 Quick Start1-51.5 InstallationWARNING: Care should be exercised to route SQC-122c cables as far as practical fromother cables that carry hi

Chapter 1 Quick Start1-61.6 Process SetupFollow these steps to build a process from the main (also called “power up”) screen.Note: If you are prompt

Chapter 1 Quick Start1-7Edit ModeTo edit a setting in any menu, turn the control knob to scroll tothe desired setting, then press the Edit SoftKey.In

Chapter 1 Quick Start1-81.7 Depositing a FilmIf you have followed this Quick Start chapter, you are ready to deposit a film.Note: You can simulate t

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Chapter 2 Operation2-12.0 IntroductionThis chapter describes common tasks associated with operating the SQC-122c. Itassumes that you understand b

Chapter 2 Operation2-2The most commonly modified parameters are shown on the first film parameters screen.Additional parameters can be accessed by

Chapter 2 Operation2-3The PID parameters control the response of the SQC-122c to changes in depositionrate. These values are unique to each deposi

Chapter 2 Operation2-4From the Film Conds menu, press Prev Menu to return to the main Film Params menu.Now press Deposit Controls. The Deposit Con

Chapter 2 Operation2-52.3 Defining a ProcessA process is a sequence of film layers deposited to achieve a particular thin filmcharacteristic. A f

Safety InformationRead this manual before installing, operating, or servicing equipment. Do not installsubstitute parts, or perform any unauthorized

Chapter 2 Operation2-6Initial Rate and Final Thickness are the main process setpoints for this layer of material.Keep in mind that the SQC-122c zer

Chapter 2 Operation2-72.4 Sensor SetupThe theory of operation for a quartz crystal sensor is quite simple. The sensor initiallyoscillates at its

Chapter 2 Operation2-8Sensor Tooling, also found in the System Params menu, adjusts for the difference inmeasured deposition rate between the senso

Chapter 2 Operation2-9Once the sensor parameters are set, test your sensor setup to assure reliable readingsat the SQC-122c. A typical single sens

Chapter 2 Operation2-102.5 Source SetupThe SQC-122c controls deposition rate by varying the control voltage to an externalevaporation (source) sup

Chapter 2 Operation2-112.6 Running a ProcessOnce a Process is defined with the desired Layers, and the sensors and source supplyare properly conne

Chapter 2 Operation2-12While we’re on the Main Menu screen, and before starting the selected process, let’scover the capabilities of the Next Menu

Chapter 2 Operation2-13Enough preliminaries, let’s start the process!Press Start from any of the main screen menus to start deposition. If the fir

Chapter 2 Operation2-14THICKNESS(kA)0.824RATE(A/s)7.8POWER(%)55.3Film : Film1Layer: 1 of 4Process: My Process 1Layer Rate: 8.00Final Thick: 1.100Ru

Chapter 2 Operation2-152.7 Loop TuningThis section will help you adjust your control loop PID parameters to achieve a stabledeposition process. K

Warranty InformationThis Sigma Instruments product is warranted against defects in material andworkmanship for a period of 1 year from the date of shi

Chapter 2 Operation2-16about 10% overshoot, lower the P Term. If the time to reach PWRDR is very slow,increase the P Term. A lower I Term will in

Chapter 2 Operation2-172.8 TroubleshootingMost SQC-122c problems are caused by defective crystals or improper film setup,particularly incorrect PI

Chapter 2 Operation2-18When the frequency reading is stable, reconnect the source supply. Start thedeposition process in Manual mode with 0% outpu

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Chapter 3 Menus3-13.0 IntroductionSQC-122c operation during deposition is accomplished by pressing one of the sixSoftKeys along the left of the

Chapter 3 Menus3-23.1 Main MenuThe default, power-up Main Screen display is shown below.THICKNESS(kA)0.000RATE(A/s)0.0POWER(%)0.0Film : Aluminu

Chapter 3 Menus3-3The Main Screen SoftKeys undergo subtle changes based on the current processstatus. The table below describes the function of

Chapter 3 Menus3-43.2 Next Menu ScreensThe Next Menu SoftKey provides access to two sub-menus of the Main Menu thatcontrol display and operatin

Chapter 3 Menus3-53.3 Quick Setup MenuThe Quick Setup Menu provides access to the most commonly adjusted parameters forthe current process and

Chapter 3 Menus3-6Quick Setup parameters are described below:Initial Rate: The beginning rate of deposition for this layer.Final Thickness: The

Table of ContentsChapter 1 Quick Start1.0 Introduction...

Chapter 3 Menus3-73.4 Process MenusThere are several tiers of Process Menus. The first menu (shown below) selects thecurrent process. The cur

Chapter 3 Menus3-8The second Process Menu shows the sequence of layers that will be deposited in thecurrent process.Main ScreenReturns to the Ma

Chapter 3 Menus3-9Each layer consists of a film (i.e. a material), plus the deposition rate and thickness thatare desired for this layer. The L

Chapter 3 Menus3-10A description of each parameter on the Layer Edit Menu follows:Initial Rate: The beginning rate of deposition for this layer.

Chapter 3 Menus3-113.5 Film MenusEach film has certain characteristics that determine how it should be deposited. TheFilm Menus allow you to s

Chapter 3 Menus3-12The material to be deposited is the most significant film parameter. However, a filmdefinition also includes the setup param

Chapter 3 Menus3-13The Film Conds SoftKey displays these additional film conditioning settings: (Refer tosection 2.2 for definitions).Exit to M

Chapter 3 Menus3-14The Deposit Controls SoftKey displays these additional film settings: (Refer to section2.2 for deposition control definitions

Chapter 3 Menus3-15A description of each film parameter follows:P Term: The proportional term sets the gain of the control loop. High gains yie

Chapter 3 Menus3-160 Disabled 5 12.5%1 30.0% 6 10.0%2 25.0% 7 7.5%3 20.0% 8 5.0%4 15.0% 9 2.5%Note: The Crystal Quality setting is very sensitiv

AppendixA. Material ParametersB. SpecificationsC. I/O ConnectionsD. Handheld Remote ControllerE. Declaration of Conformity

Chapter 3 Menus3-17Feed: The feed phase holds output power at the level and time required to wire feednew material.Idle: Idle power ramps output

Chapter 3 Menus3-183.6 System Parameters MenuThe System Parameters Menu contains settings that affect the basic operation of theSQC-122c. Syst

Chapter 3 Menus3-19Descriptions of each System Parameter follows:Period: Sets the measurement period between .1 second (10 readings per second)

Chapter 3 Menus3-20Rate Alarm Low: Sets the % deviation below rate setpoint that causes an audiblealarm.Rate Alarm High: Sets the % deviation ab

Chapter 3 Menus3-213.7 I/O SetupThe I / O Setup SoftKey displays a menu allowing you to map the eight digital inputsand the eight digital outpu

Chapter 3 Menus3-22In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputsand eight relay outputs. Options are

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Chapter 4 Options4-14.0 IntroductionThis section covers the installation of optional accessories.4.1 Option CardNo option cards are available fo

AppendixA. Material ParametersMaterial Density ZFactor Material Density ZFactorAluminum 2.73 1.08 Magnesium Fluoride 3 1Aluminum Oxide 3.97 1 Mangane

AppendixB. SpecificationsMeasurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate R

Chapter 1 Quick Start1-11.0 IntroductionThe SQC-122c is a multi-channel quartz crystal monitor and deposition controller. Itmeasures up to six 1MHz

AppendixDisplay Graphs Rate, Deviation, Power Readouts Thickness, Rate, PowerProcess Parameters (a Process is a sequence of layers) # Processes 25

AppendixC. I/O ConnectionsA 25 pin D-sub connector, located on the rear of the SQC-122c, provides Input/Outputconnections. Refer to Section 3.6 for

AppendixA Y adapter cable can be used to provide compatibility with older (non color) models ofthe SQC-122, as shown below. Contact Sigma for informa

AppendixD. Handheld Remote ControllerThe Handheld Controller provides the capability of adjusting output power remotelywhen the SQC-122c is in Manual

AppendixE. EC Declaration of ConformityManufacturer’s Name: Sigma InstrumentsManufacturer’s Address: 1318 Duff DriveFort Collins, CO 80524 USAdecla

Chapter 1 Quick Start1-21.2 Front PanelSoftKeys Control Knob Remote JackFront Panel ControlsSoftKeysProvide access to instrument operations

Chapter 1 Quick Start1-31.3 Rear Panel100-120/200-240 V~50/60 Hz25 VASensor 1 Sensor 2 Output 1 Output 2I/O 1-8RS-232Sensor 3 Sensor 4 Output 3 Outpu

Chapter 1 Quick Start1-41.4 System ConnectionsSensorFeedthroughIn-VacCable6" BNC CableOscillatorSourceShutterGround WireEvaporation SupplyOutput